Semiconductor SSIS calibration and maintenance

//Semiconductor SSIS calibration and maintenance
Semiconductor SSIS calibration and maintenance2019-03-18T08:25:47+00:00

Semiconductor SSIS calibration and maintenance

A wafer surface scanner is an optical instrument which inspects particle contamination or defects on bare silicon wafer surfaces using laser light scattering.

Thermo’s SURF-CAL™ line originally developed by Duke Scientific was developed specifically for making calibration wafers for surface scanners.

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