Surf-Cal

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Particle Deposition Standards provide a cost effective and reliable method of calibration of bare semiconductor silicon wafer Surface Scanning Inspection systems (SSIS) over a range of particle sizes from 0.047 to 3.0 µm. The product is a suspension of NIST traceable polystyrene microspheres whose concentration has been optimized for deposition on wafers by nebulization.
When used with conventional particle deposition systems, the
3 x 108 particles per mL suspension will deposit between 6 and 10 particles per cm2 on a 200 mm wafer in 30-60 seconds. The 1 x 1010 particles per mL suspension is ideal for deposition systems using particle exclusion techniques where the deposition times and concentrations vary.
The cleanliness of the suspension minimizes residue on the particle and the surface of the wafer, allowing easy calibration of scanners over their entire range of operation. With low non-volatile solids content, SURF-CAL is useful for other aerosol particle measurement applications. The clean suspension also benefits particle detection on patterned wafers, mask and reticule, and disk drives.

SKU: a7bd9868e318 Category:

Description

(NIST) traceable particle size standards enable laboratories to validate or calibrate their particle sizing instruments or methods in order to comply with ISO, GMP, GLP and other international standards. They are traceable to certified reference materials from international standard organisations through an unbroken chain of measurement leading back to the standard meter.
Brands: Thermo Scientific, Applied Microspheres.

Particle Deposition Standards provide a cost effective and reliable method of calibration of bare semiconductor silicon wafer Surface Scanning Inspection systems (SSIS) over a range of particle sizes from 0.047 to 3.0 µm. The product is a suspension of NIST traceable polystyrene microspheres whose concentration has been optimized for deposition on wafers by nebulization.
When used with conventional particle deposition systems, the
3 x 108 particles per mL suspension will deposit between 6 and 10 particles per cm2 on a 200 mm wafer in 30-60 seconds. The 1 x 1010 particles per mL suspension is ideal for deposition systems using particle exclusion techniques where the deposition times and concentrations vary.
The cleanliness of the suspension minimizes residue on the particle and the surface of the wafer, allowing easy calibration of scanners over their entire range of operation. With low non-volatile solids content, SURF-CAL is useful for other aerosol particle measurement applications. The clean suspension also benefits particle detection on patterned wafers, mask and reticule, and disk drives.

A group of various products, all slightly different for the specific type of application. These products show a well defined size uniformity and are NIST traceable
Brands: Thermo Scientific, Applied Microspheres

Surf-Cal Particle Deposition Standards are designed for the calibration of bare semiconductor silicon wafer Surface Scanning Inspection systems (SSIS) over a range of particle sizes from 0.047 to 3.0 µm. The product is a suspension of NIST traceable polystyrene microspheres with concentration that are optimized for deposition on wafers by nebulization. When used with conventional particle deposition systems, the 3 x 108 particles per mL suspension will deposit between 6 and 10 particles per cmsquare centimeter on a 200 mm wafer in 30-60 seconds. The 1 x 1010 particles per mL suspension is ideal for deposition systems using particle exclusion techniques where the deposition times and concentrations vary.

The cleanliness of the suspension minimizes residue on the particle and the surface of the wafer, allowing easy calibration of scanners over their entire range of operation. With low non-volatile solids content, SURF-CAL is useful for other aerosol particle measurement applications. The clean suspension also benefits particle detection on patterned wafers, mask and reticule, and disk drives.

  • Item no: PD-204B
  • Product: Particle Size Standards
  • Particle Size: 0.204 µm
  • Concentration: 1 x 10E10 / mL
  • Composition: Polystyrene
  • Surface Modification: n/a
  • Volume / Quantity: 50 mL
  • Color: WHITE
  • NIST Traceable: YES
  • (Key) application: Metrology and instrument calibration
  • (Sub) application: Particle sizing
  • Application L1: SSIS calibration
  • Application L2: Semi conductor
  • Brand: Thermo Scientific

Additional information

Item no

Particle Size

Concentration

Composition

Surface Modification

Volume/ Quantity

Color

NIST Traceable

Key Application

(Sub) Application

Application L1

Application L2

Brand

Productname

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